Development of Two-Axis MEMS Magnetic Field Sensor Using an Eccentric Resonator

Professor Jongbaeg Kim's research team has successfully developed a two-axis MEMS magnetic field sensor using an electromagentic inductor and an eccentric resonator driven by electrostatic forces. This approach allowed for the realization of a resonator that resonates in orthogonal directions by altering the sensor's operating frequency, thereby experimentally validating the capability for two-axis magnetic field detection. This work was presented at the 2024 37th IEEE MEMS Conference organized by the Institute of Electrical and Electronics Engineers (IEEE), highlighting its significance within the community. Additionally, the research earned distinction as a finalist for the Outstanding Student Oral Presentation Award, an accolade bestowed upon only 19 of the 659 papers submitted, acknowledging its excellence and contribution to the field.

The link: https://ieeexplore.ieee.org/document/10439558